J.A. Woollam
iSE Ellipsometer
The iSE is a new in-situ spectroscopic ellipsometer developed for real-time monitoring of thin film processing. Using our proven technology, the iSE enables users to optimize optical properties of deposited films, control film growth with sub-angstrom sensitivity, and monitor growth kinetics.
Specification
| Ellipsometer Type | Dual-Rotation™ Optical Design |
| Wavelength Range | 400-1000 nm |
| Number of Wavelengths | 190 |
| Detector | CCD |
| Data Acquisition Rate | 0.3 sec. [Fastest] 1-2 sec. [Typical] |
| Beam Diameter | ~3mm |
| Chamber Requirements | Port Size: 1.33” or 2.75” Typical Port Angle: 60°-75°* *measured from sample normal |
Product Models
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