The theta-SE is a push-button spectroscopic ellipsometer for characterizing thin film uniformity. It features advanced ellipsometry instrumentation in a compact package at an affordable price.
Ellipsometer Type | Dual-Rotation Optical Design |
Mapping Overview | 300 mm diameter |
Wavelength Range | 400-1000 nm |
Number of Wavelengths | 190 |
Detector | CCD |
Focusing Optics | Included |
Data Acquisition Rate | 0.3 sec. [Fastest] 1-2 sec. [Typical] |
Beam Diameter | Nominal: 250 x 600 μm on sample |
Data Types | Spectroscopic ellipsometry and advanced g-SE or MM-SE |
Angle of Incidence | 65° fixed for all measurements |
Data Types | Spectroscopic ellipsometry and advanced g-SE or MM-SE |
# | Image | Model Name | Detail |
---|