The VASE® is an accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more. It combines high accuracy and precision with a wide spectral range – up to 193 to 3200nm. Variable wavelength and angle of incidence allow flexible measurement capabilities, including: • Reflection and Transmission Ellipsometry • Generalized Ellipsometry (Anisotropy, Retardance, Birefringence) • Reflectance (R) and Transmittance (T) intensity • Cross-polarized R/T • Depolarization • Scatterometry • Mueller-matrix